Formation of silicon carbide and diamond nanoparticles in the surface layer of a silicon target during short-pulse carbon ion implantation

Title
Formation of silicon carbide and diamond nanoparticles in the surface layer of a silicon target during short-pulse carbon ion implantation
Authors
Keywords
-
Journal
TECHNICAL PHYSICS
Volume 54, Issue 4, Pages 600-602
Publisher
Pleiades Publishing Ltd
Online
2009-05-05
DOI
10.1134/s1063784209040264

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