Full field chemical imaging of buried native sub-oxide layers on doped silicon patterns

Published 2010 View Full Article

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Title
Full field chemical imaging of buried native sub-oxide layers on doped silicon patterns
Authors
Keywords
-
Journal
SURFACE SCIENCE
Volume 604, Issue 19-20, Pages 1628-1636
Publisher
Elsevier BV
Online
2010-06-17
DOI
10.1016/j.susc.2010.06.006

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