Photo-induced site-specific nitridation of plasma-deposited B10C2Hx films: A new pathway toward post-deposition doping of semiconducting boron carbides

Published 2010 View Full Article

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Title
Photo-induced site-specific nitridation of plasma-deposited B10C2Hx films: A new pathway toward post-deposition doping of semiconducting boron carbides
Authors
Keywords
-
Journal
SURFACE SCIENCE
Volume 604, Issue 21-22, Pages L51-L54
Publisher
Elsevier BV
Online
2010-08-04
DOI
10.1016/j.susc.2010.07.023

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