Vapour phase formation of amino functionalised Si3N4 surfaces

Title
Vapour phase formation of amino functionalised Si3N4 surfaces
Authors
Keywords
-
Journal
SURFACE SCIENCE
Volume 602, Issue 16, Pages 2724-2733
Publisher
Elsevier BV
Online
2008-07-10
DOI
10.1016/j.susc.2008.06.026

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