Etching of polyethylene terephthalate thin films by neutral oxygen atoms in the late flowing afterglow of oxygen plasma

Published 2012 View Full Article

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Title
Etching of polyethylene terephthalate thin films by neutral oxygen atoms in the late flowing afterglow of oxygen plasma
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 44, Issue 13, Pages 1565-1571
Publisher
Wiley
Online
2012-07-03
DOI
10.1002/sia.5064

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