The effect of thermal annealing on the microstructure and mechanical properties of magnetron sputtered hydrogenated amorphous carbon films

Title
The effect of thermal annealing on the microstructure and mechanical properties of magnetron sputtered hydrogenated amorphous carbon films
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 44, Issue 2, Pages 162-165
Publisher
Wiley
Online
2011-07-19
DOI
10.1002/sia.3787

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