Study of the deposition of Ti/TiN multilayers by magnetron sputtering

Published 2010 View Full Article

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Title
Study of the deposition of Ti/TiN multilayers by magnetron sputtering
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 42, Issue 6-7, Pages 1176-1179
Publisher
Wiley
Online
2010-04-13
DOI
10.1002/sia.3299

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