The influence of beam energy on apparent layer thickness using ultralow energy O2+ SIMS on surface Si1−xGex

Published 2010 View Full Article

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Title
The influence of beam energy on apparent layer thickness using ultralow energy O2+ SIMS on surface Si1−xGex
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 43, Issue 1-2, Pages 211-213
Publisher
Wiley
Online
2010-05-21
DOI
10.1002/sia.3433
References
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