Optimization and comparison of depth profiling in GaAs and GaSb with TOF-SIMS

Title
Optimization and comparison of depth profiling in GaAs and GaSb with TOF-SIMS
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 43, Issue 1-2, Pages 673-675
Publisher
Wiley
Online
2010-07-12
DOI
10.1002/sia.3659

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