Surface characterization of the SiOxfilms prepared by a remote atmospheric pressure plasma jet

Published 2008 View Full Article

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Title
Surface characterization of the SiOxfilms prepared by a remote atmospheric pressure plasma jet
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 41, Issue 1, Pages 44-48
Publisher
Wiley
Online
2008-11-22
DOI
10.1002/sia.2975

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