Analysis of thermal parameters and factors acting on thermal conduction of low-k films

Published 2008 View Full Article

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Title
Analysis of thermal parameters and factors acting on thermal conduction of low-k films
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 40, Issue 10, Pages 1328-1332
Publisher
Wiley
Online
2008-07-22
DOI
10.1002/sia.2880

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