Journal
SURFACE AND INTERFACE ANALYSIS
Volume 40, Issue 12, Pages 1545-1551Publisher
WILEY
DOI: 10.1002/sia.2933
Keywords
molecular depth profiling; cluster SIMS; erosion dynamics
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A simple model which describes the essential features commonly observed in a molecular sputter depth profile is presented. General predictions of the dependence of measured molecular ion signals on the primary ion fluence are derived for the specific case where a mass spectrometric technique such as SIMS or secondary neutral mass spectrometry (SNMS) is used to analyze the momentary surface. The results are compared with recent experimental data on molecular depth profiles obtained by cluster-ion-initiated SIMS of organic overlayers. Copyright (C) 2008 John Wiley & Sons, Ltd.
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