Analysis of interface impurities in electroplated Cu layers by using GD-OES and TOF-SIMS

Published 2008 View Full Article

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Title
Analysis of interface impurities in electroplated Cu layers by using GD-OES and TOF-SIMS
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 40, Issue 3-4, Pages 418-422
Publisher
Wiley
Online
2008-03-03
DOI
10.1002/sia.2743

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