Interfacial studies of Al2O3 deposited on 4H-SiC(0001)

Title
Interfacial studies of Al2O3 deposited on 4H-SiC(0001)
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 40, Issue 3-4, Pages 822-825
Publisher
Wiley
Online
2008-02-27
DOI
10.1002/sia.2787

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