Patterning of permalloy thin films by means of electron-beam lithography and focused ion-beam milling

Published 2008 View Full Article

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Title
Patterning of permalloy thin films by means of electron-beam lithography and focused ion-beam milling
Authors
Keywords
-
Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 44, Issue 4-5, Pages 699-704
Publisher
Elsevier BV
Online
2008-01-25
DOI
10.1016/j.spmi.2007.12.009

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