Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition

Published 2012 View Full Article

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Title
Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
Authors
Keywords
-
Journal
SUPERCONDUCTOR SCIENCE & TECHNOLOGY
Volume 26, Issue 2, Pages 025008
Publisher
IOP Publishing
Online
2012-12-18
DOI
10.1088/0953-2048/26/2/025008

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