Electrical characteristics of Al2O3/TiO2/Al2O3 prepared by atomic layer deposition on (NH4)2S-treated GaAs

Published 2013 View Full Article

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Title
Electrical characteristics of Al2O3/TiO2/Al2O3 prepared by atomic layer deposition on (NH4)2S-treated GaAs
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 92, Issue -, Pages 1-4
Publisher
Elsevier BV
Online
2013-11-21
DOI
10.1016/j.sse.2013.10.002

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