Diffusion formation of nickel silicide contacts in SiNWs

Title
Diffusion formation of nickel silicide contacts in SiNWs
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 80, Issue -, Pages 110-117
Publisher
Elsevier BV
Online
2012-12-22
DOI
10.1016/j.sse.2012.11.004

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