Self-aligned multi-channel silicon nanowire field-effect transistors

Title
Self-aligned multi-channel silicon nanowire field-effect transistors
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 78, Issue -, Pages 92-96
Publisher
Elsevier BV
Online
2012-07-21
DOI
10.1016/j.sse.2012.05.058

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