Modeling the breakdown statistics of Al2O3/HfO2 nanolaminates grown by atomic-layer-deposition

Published 2011 View Full Article

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Title
Modeling the breakdown statistics of Al2O3/HfO2 nanolaminates grown by atomic-layer-deposition
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 71, Issue -, Pages 48-52
Publisher
Elsevier BV
Online
2011-12-10
DOI
10.1016/j.sse.2011.10.019

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