Interface and electrical properties of La-silicate for direct contact of high-k with silicon

Published 2010 View Full Article

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Title
Interface and electrical properties of La-silicate for direct contact of high-k with silicon
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 54, Issue 7, Pages 715-719
Publisher
Elsevier BV
Online
2010-04-07
DOI
10.1016/j.sse.2010.03.005

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