Formation, etching and electrical characterization of a thermally grown gallium oxide on the Ga-face of a bulk GaN substrate

Published 2007 View Full Article

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Title
Formation, etching and electrical characterization of a thermally grown gallium oxide on the Ga-face of a bulk GaN substrate
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 52, Issue 5, Pages 756-764
Publisher
Elsevier BV
Online
2007-12-07
DOI
10.1016/j.sse.2007.10.045

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