3D nanowire gate-all-around transistors: Specific integration and electrical features

Published 2007 View Full Article

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Title
3D nanowire gate-all-around transistors: Specific integration and electrical features
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 52, Issue 4, Pages 519-525
Publisher
Elsevier BV
Online
2007-12-22
DOI
10.1016/j.sse.2007.10.050

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