Small-angle X-ray scattering from nano-Si embedded a-SiC:H deposited by hot-wire chemical vapor deposition

Title
Small-angle X-ray scattering from nano-Si embedded a-SiC:H deposited by hot-wire chemical vapor deposition
Authors
Keywords
-
Journal
SOLID STATE SCIENCES
Volume 11, Issue 8, Pages 1408-1411
Publisher
Elsevier BV
Online
2009-04-24
DOI
10.1016/j.solidstatesciences.2009.04.015

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