Relationship between the structure and the optical and electrical properties of reactively sputtered carbon nitride films

Published 2007 View Full Article

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Title
Relationship between the structure and the optical and electrical properties of reactively sputtered carbon nitride films
Authors
Keywords
-
Journal
SOLID STATE COMMUNICATIONS
Volume 145, Issue 7-8, Pages 392-396
Publisher
Elsevier BV
Online
2007-11-27
DOI
10.1016/j.ssc.2007.11.025

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