Novel etching method on high rate ZnO:Al thin films reactively sputtered from dual tube metallic targets for silicon-based solar cells

Title
Novel etching method on high rate ZnO:Al thin films reactively sputtered from dual tube metallic targets for silicon-based solar cells
Authors
Keywords
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Journal
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 95, Issue 3, Pages 964-968
Publisher
Elsevier BV
Online
2011-01-04
DOI
10.1016/j.solmat.2010.11.033

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