Stoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targets

Title
Stoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targets
Authors
Keywords
-
Journal
AIP Advances
Volume 5, Issue 4, Pages 047125
Publisher
AIP Publishing
Online
2015-04-17
DOI
10.1063/1.4918684

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