Journal
SOFT MATTER
Volume 6, Issue 18, Pages 4460-4465Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/c0sm00238k
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Funding
- National Basic Research Program of China [2007CB925101]
- National Natural Science Foundation of China [10974080, 20674037, 10629401]
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Generating high density-multiplied nanopatterns through the directed self-assembly of block copolymers (BCPs) will significantly influence the current microelectronics and storage industries. Here, we provide a two-dimensional (2D) sparse rectangle lattice template to direct the equilibrium morphologies of block copolymers. The areal density of the substrate is multiplied by a factor of 34 through the self-assembled BCP microdomains without losing the long-range order. Local spacings of the BCP microdomains and their orientation can be modulated by template spacings. The selection of optimal templates for specific applications is summarized in the phase diagram based on the template spacings. The suggested approach provides a candidate to enhance the performance of current semiconductor devices, especially ultrahigh-density data storage media.
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