Micromachined gas sensors based on tungsten oxide nanoneedles directly integrated via aerosol assisted CVD

Title
Micromachined gas sensors based on tungsten oxide nanoneedles directly integrated via aerosol assisted CVD
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 198, Issue -, Pages 210-218
Publisher
Elsevier BV
Online
2014-03-22
DOI
10.1016/j.snb.2014.03.040

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