A hybrid silicon–parylene neural probe with locally flexible regions

Published 2014 View Full Article

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Title
A hybrid silicon–parylene neural probe with locally flexible regions
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 195, Issue -, Pages 416-422
Publisher
Elsevier BV
Online
2014-01-23
DOI
10.1016/j.snb.2014.01.048

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