Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 194, Issue -, Pages 220-228Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2013.12.075
Keywords
Gas sensor; MEMS; NEMS; Nano Electro Mechanical Systems; Chromatography column; Modeling
Funding
- European Research Council [240382 - DELPHINS]
- Commissariat a l'Energie Atomique et aux Energies Alternatives (France)
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In this work, a comprehensive, predictive and quantitative model of a whole gas analyzer is provided in order to facilitate the design of such high performance devices. All the pre-analytical (gas separation) and analytical (detection and readout) stages have been modeled and experimentally calibrated. Heterogeneous simulations have been used to quantify the impact of the whole architecture on the output characteristic of the gas analyzer. Finally, the model of the NEMS sensor and the chromatography micro-column assembly has been experimentally validated with TEOX (toluene, ethylbenzene, octane, and xylene) gases. (C) 2013 Elsevier B.V. All rights reserved.
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