4.7 Article

Patterning and electrical interfacing of individually controllable conducting polymer microactuators

Journal

SENSORS AND ACTUATORS B-CHEMICAL
Volume 183, Issue -, Pages 283-289

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2013.02.075

Keywords

Polypyrrole; Actuator; Microfabrication; Electrical interface; Electroactive polymer actuators; PVDF membrane

Funding

  1. European Science Foundation COST Action [MP1003, COST-STSM-MP1003-8971]
  2. Swedish Research Council [VR - 2010-6672]
  3. Knut & Alice Wallenberg Stiftelse [LiU-2010-00318]
  4. Linkoping University
  5. EU Erasmus programme
  6. Australian Research Council through the Centres of Excellence [DP0878931]

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Conducting polymer actuators such as polypyrrole (PPy) microactuators are interesting candidates to drive autonomous microrobotic devices that require low weight and low power. Simple PPy tri-layer bending type microactuators that operate in air have been demonstrated previously but they lack individual control and had problems with short circuiting due to electrical connections. The lack of micropatterning methods and proper interfacing are currently major obstacles in the development of PPy tri-layer microactuators. Here, we report for the first time methods for successfully patterning and interfacing of such tri-layer PPy microactuators. The PPy tri-layer actuators were patterned using adapted microfabrication technology including photolithography. The interface was based on a flexible printed circuit board comprising the electronic circuit into which the actuator unit was embedded. It showed that the microfabricated tri-layer actuators functioned as good as the normally fabricated actuators. The new interface seemed to actually improve the actuator performance. This interfacing method could also be applied to other electroactive polymer devices, such as ion polymer metal composites (IPMC) and dielectric elastomers (DE). (c) 2013 Elsevier B.V. All rights reserved.

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