Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 177, Issue -, Pages 1156-1160Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2012.12.016
Keywords
Anodization; Titanium oxide nanotube; Self-organization; Miniaturization
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We have fabricated gas sensors with micro-scale-patterned anodic titanium oxide nanotube films formed by local anodization of titanium wires using a hybrid process between top-down (photolithography) and bottom-up (anodization) processes. We examine the response characteristics of the sensors for hydrogen gas to demonstrate that a few % of hydrogen gas in nitrogen ambient produces currents in the range of mA without special interdigitated electrodes. The sensitivity is remarkably improved by thinning the tube walls. The hybrid process is a suitable method for fabrication of micro-scaled gas sensors, which has useful features such as low power consumption, high reliability and portability. (c) 2012 Elsevier B.V. All rights reserved.
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