Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics

Title
Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 154, Issue 2, Pages 283-287
Publisher
Elsevier BV
Online
2010-01-16
DOI
10.1016/j.snb.2010.01.010

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