Functional testing and characterisation of (bio-)chemical sensors on wafer level

Title
Functional testing and characterisation of (bio-)chemical sensors on wafer level
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 154, Issue 2, Pages 169-173
Publisher
Elsevier BV
Online
2009-11-18
DOI
10.1016/j.snb.2009.11.024

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