Capacitive humidity sensor based on amorphous carbon film/n-Si heterojunctions

Published 2010 View Full Article

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Title
Capacitive humidity sensor based on amorphous carbon film/n-Si heterojunctions
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 150, Issue 1, Pages 487-489
Publisher
Elsevier BV
Online
2010-08-04
DOI
10.1016/j.snb.2010.07.038

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