A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating

Published 2010 View Full Article

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Title
A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 149, Issue 1, Pages 136-142
Publisher
Elsevier BV
Online
2010-06-17
DOI
10.1016/j.snb.2010.06.010

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