Thickness dependence of sensor response for CO gas sensing by tin oxide films grown using atomic layer deposition

Published 2008 View Full Article

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Title
Thickness dependence of sensor response for CO gas sensing by tin oxide films grown using atomic layer deposition
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 135, Issue 1, Pages 152-160
Publisher
Elsevier BV
Online
2008-08-24
DOI
10.1016/j.snb.2008.08.015

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