TiO2 thin films from titanium butoxide: Synthesis, Pt addition, structural stability, microelectronic processing and gas-sensing properties

Published 2007 View Full Article

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Title
TiO2 thin films from titanium butoxide: Synthesis, Pt addition, structural stability, microelectronic processing and gas-sensing properties
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 130, Issue 2, Pages 599-608
Publisher
Elsevier BV
Online
2007-11-01
DOI
10.1016/j.snb.2007.10.016

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