4.7 Article

Dual-mode operation of a Pd/AlN/SiC device for hydrogen sensing

Journal

SENSORS AND ACTUATORS B-CHEMICAL
Volume 129, Issue 1, Pages 35-39

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2007.07.064

Keywords

hydrogen sensor; dual-mode operation; Pd/AlN/SiC device; dual mode either as a rectifying diode or a capacitor

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The electrical response of a hydrogen-sensing device is either a rectifying diode-type or a capacitor-type but could not be operated simultaneously in both the modes. However, we are able to demonstrate that a Pd/AlN/SiC device can operate in dual mode either as a rectifying diode or a capacitor. The device with a 50 nm AlN layer shows a shift of similar to 0.35 V for 100 ppm H-2 in both the modes, at a temperature of 150 degrees C. It seems that the presence of donor levels in the bandgap, of the AlN layer with a wide range of energy is responsible for the observed electrical behavior of this device. (C) 2007 Elsevier B.V. All rights reserved.

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