Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 134, Issue 2, Pages 539-544Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2008.05.036
Keywords
ELA; Amorphous silicon (a-Si); LTPS; Palladium (Pd); MIS; MS
Funding
- National Science Council [NSC96-2221-E-006-284-MY3]
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The hydrogen detecting performance of a Pd/n-LTPS/glass thin film Schottky diode is significantly improved with a TiO2 interface layer. The n-LTPS (n-type low temperature polysilicon) thin film is an amorphous silicon (a-Si) film on a glass substrate with both excimer laser annealing and PH3 gas plasma treating. Under the conditions of room temperature and -2V bias, the addition of the TiO2 interface layer promotes the relative sensitivity ratio from 290.4% to 1539.6% to 50 ppm H-2. The response time is also reduced from 61s to 40s. Compared to the reported H-2 sensors with bulk Si or III-V compounds, the developed Pd/TiO2/n-LTPS/glass Schottky diode shows a high potential in development and realization of a low cost and highly sensitive hydrogen sensor. (c) 2008 Elsevier B.V. All rights reserved.
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