Electrically isolated thermally carbonized porous silicon layer for humidity sensing purposes

Published 2008 View Full Article

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Title
Electrically isolated thermally carbonized porous silicon layer for humidity sensing purposes
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 131, Issue 2, Pages 627-632
Publisher
Elsevier BV
Online
2008-01-15
DOI
10.1016/j.snb.2007.12.062

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