Metal-armouring for shock protection of MEMS

Title
Metal-armouring for shock protection of MEMS
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 215, Issue -, Pages 36-43
Publisher
Elsevier BV
Online
2013-11-21
DOI
10.1016/j.sna.2013.11.008

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