Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level

Published 2014 View Full Article

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Title
Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 210, Issue -, Pages 1-9
Publisher
Elsevier BV
Online
2014-02-03
DOI
10.1016/j.sna.2014.01.032

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