Accurate modeling of air shear damping of a silicon lateral rotary micro-resonator for MEMS environmental monitoring applications

Published 2014 View Full Article

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Title
Accurate modeling of air shear damping of a silicon lateral rotary micro-resonator for MEMS environmental monitoring applications
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 216, Issue -, Pages 342-348
Publisher
Elsevier BV
Online
2014-06-20
DOI
10.1016/j.sna.2014.06.008

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