High flow-rate piezoelectric micropump with two fixed ends polydimethylsiloxane valves and compressible spaces

Published 2014 View Full Article

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Title
High flow-rate piezoelectric micropump with two fixed ends polydimethylsiloxane valves and compressible spaces
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 218, Issue -, Pages 94-104
Publisher
Elsevier BV
Online
2014-08-10
DOI
10.1016/j.sna.2014.07.026

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