Ultrasound enhanced electrostatic batch assembly for MEMS

Published 2013 View Full Article

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Title
Ultrasound enhanced electrostatic batch assembly for MEMS
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 197, Issue -, Pages 136-149
Publisher
Elsevier BV
Online
2013-04-04
DOI
10.1016/j.sna.2013.03.017

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