Bimaterial microcantilevers with black silicon nanocone arrays

Title
Bimaterial microcantilevers with black silicon nanocone arrays
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 199, Issue -, Pages 143-148
Publisher
Elsevier BV
Online
2013-06-03
DOI
10.1016/j.sna.2013.05.007

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