Silicon anisotropic etching in TMAH solutions containing alcohol and surfactant additives

Published 2012 View Full Article

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Title
Silicon anisotropic etching in TMAH solutions containing alcohol and surfactant additives
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 178, Issue -, Pages 126-135
Publisher
Elsevier BV
Online
2012-02-25
DOI
10.1016/j.sna.2012.02.018

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