Characterization of a SAW-Pirani vacuum sensor for two different operating modes

Published 2012 View Full Article

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Title
Characterization of a SAW-Pirani vacuum sensor for two different operating modes
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 188, Issue -, Pages 41-47
Publisher
Elsevier BV
Online
2012-02-08
DOI
10.1016/j.sna.2012.01.039

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